HOME > LATEST NEWS >
CLICK HERE FOR MORE RELEASES FROM THIS COMPANY
Click here for full text in ENGLISH - UK VERSION | ENGLISH - USA VERSION |GERMAN | ITALIAN | SPANISH |CHINESE
BOC216a
Issue Date: 13th October 2004
CLICK
HERE for 300dpi RGB hi-res image
To download image to computer:
PC 'right-click', choose 'Save Pictures As'; MAC 'click and
hold', choose 'Download Image to Disk'.
New vacuum coating system offers increased productivity and flexibility for thin film deposition processes
BOC Edwards has introduced a new addition to
its range of vacuum coating systems for thin film deposition
processes. The TF600 combines a 600mm wide coating chamber
with a high throughput, vacuum pumping system. The new system
is designed to deliver increased productivity and flexibility
for those responsible for the research, development and production
of substrates used in the semiconductor, laser and scientific
industries.
The TF600 has several new design features such as the placement
of the high vacuum pumping system at the rear of the chamber,
to provide faster pumpdown. Pumping system options include
diffusion, turbomolecular, and cryogenic high vacuum pumps,
and the XDS 35i ‘dry’ scroll pump for backing
and chamber roughing.
Every TF600 system is custom built to the user’s specific
requirements. Process options include resistance evaporation,
electron beam, RF, DC and pulsed DC sputtering. With a variety
of chamber heights, loadlock options and multiple source configurations,
the TF600 allows users to address a wide range of applications
and specialist techniques such as lift off and ion beam processing.
The TF600 joins BOC Edwards’ range of highly successful
thin film systems, which include Temescal electron beam systems.
Also available is the entry level Auto 306 evaporator and
the versatile Auto 500, which offer additional chamber and
deposition options.
For further information contact
Andrew Davis, BOC Edwards. Manor Royal, Crawley, RH10
9LW
Tel: 01293 603134 Fax: 01293 534149
email: andrewdavis@edwards.boc.com
Website: http://www.edwards.boc.com
CLICK
HERE for 300dpi RGB hi-res image
To download image to computer:
PC 'right-click', choose 'Save Pictures As'; MAC 'click and
hold', choose 'Download Image to Disk'.
New Vacuum Coating System Offers Increased
Productivity And Flexibility For Thin Film Deposition Processes
BOC Edwards has introduced a new addition to
its range of vacuum coating systems for thin film deposition
processes. The TF600 combines a 600mm wide coating chamber
with a high throughput, vacuum pumping system. The new system
is designed to deliver increased productivity and flexibility
for those responsible for the research, development and production
of substrates used in the semiconductor, laser and scientific
industries.
The TF600 has several new design features such as the placement
of the high vacuum pumping system at the rear of the chamber,
to provide faster pumpdown. Pumping system options include
diffusion, turbomolecular, and cryogenic high vacuum pumps,
and the XDS 35i ‘dry’ scroll pump for backing
and chamber roughing.
Every TF600 system is custom built to the user’s specific
requirements. Process options include resistance evaporation,
electron beam, RF, DC and pulsed DC sputtering. With a variety
of chamber heights, loadlock options and multiple source configurations,
the TF600 allows users to address a wide range of applications
and specialist techniques such as lift off and ion beam processing.
The TF600 joins BOC Edwards’ range of highly successful
thin film systems, which include Temescal electron beam systems.
Also available is the entry level Auto 306 evaporator and
the versatile Auto 500, which offer additional chamber and
deposition options.
For further information contact
Anne Bradnick, Marketing Communications
Tel: 800-848-9800 x3517
email: anne.bradnick@bocedwards.com
Website: http://www.edwards.boc.com