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BOC216
Issue Date:16th August 2005
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New vacuum coating system offers increased productivity and flexibility for thin film deposition processes
BOC
Edwards has introduced a new addition to its range of vacuum
coating systems for thin film deposition processes. The TF600
combines a 600mm wide coating chamber with a high throughput,
vacuum pumping system. The new system is designed to deliver
increased productivity and flexibility for those responsible
for the research, development and production of substrates
used in the semiconductor, laser and scientific industries.
The TF600 has several new design features such as the placement
of the high vacuum pumping system at the rear of the chamber,
to provide faster pumpdown. Pumping system options include
diffusion, turbomolecular, and cryogenic high vacuum pumps,
and the XDS 35i ‘dry’ scroll pump for backing
and chamber roughing.
Every TF600 system is custom built to the user’s specific
requirements. Process options include resistance evaporation,
electron beam, RF, DC and pulsed DC sputtering. With a variety
of chamber heights, loadlock options and multiple source configurations,
the TF600 allows users to address a wide range of applications
and specialist techniques such as lift off and ion beam processing.
The TF600 joins BOC Edwards’ range of highly successful
thin film systems, which include Temescal electron beam systems.
Also available is the entry level Auto 306 evaporator and
the versatile Auto 500, which offer additional chamber and
deposition options.
For further information contact
Andrew Davis, BOC Edwards. Manor Royal, Crawley, RH10
9LW
Tel: 01293 603134 Fax: 01293 534149
email: andrewdavis@edwards.boc.com
Website: http://www.edwards.boc.com